Staying inside increasingly narrow process windows as specialty devices scale, diversify, and enter high-volume production.

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Abstract: The integration of MEMS microphones in RF-intensive environments presents new challenges due to electromagnetic interference (EMI), particularly audible interference such as TDMA noise. As ...

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Abstract: This paper reports a simple method for reducing the effects of creep in compact MEMS differential resonant accelerometer (DRA) modules. Creep is a type of permanent deformation induced in ...