Rapid and precise focusing method for image-based overlay metrology
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Rapid and precise focusing method for image-based overlay metrology
Swift and accurate measurement of overlay errors has long been imperative for ensuring throughput and yield in integrated circuit (IC) manufacturing. At present, image-based overlay (IBO) remains the predominant method for overlay metrology, relying on Linnik scanning white light interferometry (LSWLI) to guarantee rapid and precise focus ...
Dec 15, 2024
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